US 11,723,234 B2
Display backplane, manufacturing method thereof, and display device
Peng Chen, Beijing (CN); Kuo Sun, Beijing (CN); Xuan Pang, Beijing (CN); Yanyan Zhao, Beijing (CN); Shanshan Bai, Beijing (CN); and Renrong Gai, Beijing (CN)
Assigned to Chengdu BOE Optoelectronics Technology Co., Ltd., Sichuan (CN); and BOE Technology Group Co., Ltd., Beijing (CN)
Appl. No. 16/960,883
Filed by Chengdu BOE Optoelectronics Technology Co., Ltd., Sichuan (CN); and BOE Technology Group Co., Ltd., Beijing (CN)
PCT Filed Feb. 18, 2020, PCT No. PCT/CN2020/075713
§ 371(c)(1), (2) Date Jul. 8, 2020,
PCT Pub. No. WO2020/211518, PCT Pub. Date Oct. 22, 2020.
Claims priority of application No. 201910298932.1 (CN), filed on Apr. 15, 2019.
Prior Publication US 2021/0233981 A1, Jul. 29, 2021
Int. Cl. H01L 27/32 (2006.01); H01L 51/56 (2006.01); H10K 59/122 (2023.01); C23C 14/04 (2006.01); H10K 50/822 (2023.01); H10K 50/828 (2023.01); H10K 71/00 (2023.01); H10K 59/121 (2023.01); H10K 102/00 (2023.01)
CPC H10K 59/122 (2023.02) [C23C 14/042 (2013.01); H10K 50/822 (2023.02); H10K 50/828 (2023.02); H10K 71/00 (2023.02); H10K 59/121 (2023.02); H10K 2102/351 (2023.02)] 1 Claim
OG exemplary drawing
 
1. A method for manufacturing a display backplane, comprising:
forming a first insulating layer and an emitting layer on a side of a substrate, wherein a transparent display area and a normal display area are divided on the substrate, the first insulating layer has a plurality of openings, and an orthographic projection of the openings on the substrate is within an orthographic projection of the emitting layer on the substrate;
forming a first sub-layer of a first electrode on a remote side of the emitting layer and a remote side of the first insulating layer from the substrate; and
forming a second sub-layer of the first electrode on a remote surface of the first sub-layer from the substrate, wherein the second sub-layer is patterned by a vapor deposition using a second mask defining a second opening portion and a fine metal mask portion, and an opening shape of the second opening portion corresponds to a shape of the second sub-layer in the normal display area, and a hollowed-out pattern of the fine metal mask portion corresponds to a shape of the second sub-layer in the transparent display area,
wherein a thickness of the first sub-layer is smaller than a thickness of the second sub-layer.