CPC H05G 2/008 (2013.01) [G03F 7/70033 (2013.01)] | 20 Claims |
1. A method, comprising:
providing a beam from a laser source;
modifying a shape of the beam to form a modified beam, wherein the modifying the shape of the beam includes:
providing the beam in a Gaussian shape; and
passing the Gaussian shape beam through a beam-shaping unit, the beam-shaping unit including an opening that defines an inner and outer diameter of a ring-shape; and
performing a process to generate an extreme ultraviolet (EUV) light using the modified beam.
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