CPC H03H 9/2431 (2013.01) [B81B 3/0027 (2013.01); H03H 9/02259 (2013.01); B81B 2201/0271 (2013.01); B81B 2201/047 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/04 (2013.01)] | 20 Claims |
1. A microelectromechanical systems (MEMS)-tunable optical ring resonator comprising:
a resonator ring adapted to have a minimum free spectral range of 1 nm;
a tuner ring that is positioned directly above the resonator ring, the tuner ring adapted to have a minimum free spectral range of 1 nm, the tuner ring adapted to move in a direction normal to a plane of the resonator ring;
a top electrode that is mechanically coupled to the tuner ring;
a bottom electrode that is mechanically coupled to the resonator ring; and
one or more springs each of which is mechanically and electrically coupled to the top electrode;
wherein a resonant wavelength of the resonator ring is tunable by applying a voltage between the top electrode and the bottom electrode.
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