US 11,722,120 B1
MEMS-tunable optical ring resonator
Michael Wood, Albuquerque, NM (US); Alejandro J. Grine, Albuquerque, NM (US); Darwin K. Serkland, Albuquerque, NM (US); and Alexander Ruyack, Albuquerque, NM (US)
Assigned to National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (US)
Filed by National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (US)
Filed on Aug. 2, 2021, as Appl. No. 17/391,126.
Claims priority of provisional application 63/061,301, filed on Aug. 5, 2020.
Int. Cl. H03H 9/24 (2006.01); B81B 3/00 (2006.01); H03H 9/02 (2006.01)
CPC H03H 9/2431 (2013.01) [B81B 3/0027 (2013.01); H03H 9/02259 (2013.01); B81B 2201/0271 (2013.01); B81B 2201/047 (2013.01); B81B 2203/0307 (2013.01); B81B 2203/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A microelectromechanical systems (MEMS)-tunable optical ring resonator comprising:
a resonator ring adapted to have a minimum free spectral range of 1 nm;
a tuner ring that is positioned directly above the resonator ring, the tuner ring adapted to have a minimum free spectral range of 1 nm, the tuner ring adapted to move in a direction normal to a plane of the resonator ring;
a top electrode that is mechanically coupled to the tuner ring;
a bottom electrode that is mechanically coupled to the resonator ring; and
one or more springs each of which is mechanically and electrically coupled to the top electrode;
wherein a resonant wavelength of the resonator ring is tunable by applying a voltage between the top electrode and the bottom electrode.