US 11,722,116 B2
Acoustic resonators and filters that support fifth generation (5G) wireless communications standards
Yansong Yang, Urbana, IL (US); Ruochen Lu, Champaign, IL (US); and Songbin Gong, Champaign, IL (US)
Assigned to The Board of Trustees of the University of Illinois, Urbana, IL (US)
Filed by Board of Trustees of the University of Illinois, Urbana, IL (US)
Filed on Nov. 24, 2020, as Appl. No. 17/247,040.
Claims priority of provisional application 62/939,817, filed on Nov. 25, 2019.
Prior Publication US 2021/0159874 A1, May 27, 2021
Int. Cl. H03H 9/02 (2006.01); H03H 3/02 (2006.01); H03H 9/17 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02228 (2013.01) [H03H 3/02 (2013.01); H03H 9/02031 (2013.01); H03H 9/173 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/568 (2013.01); H03H 2003/021 (2013.01)] 30 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a piezoelectric thin film suspended above a carrier substrate, wherein the piezoelectric thin film comprises one of lithium niobate (LiNbO3) or lithium tantalate (LiTaO3) adapted to propagate an acoustic wave in a Lamb wave mode excited by a component of an electric field that is oriented in a longitudinal direction along a length of the piezoelectric thin film;
a signal electrode disposed on, and in physical contact with, the piezoelectric thin film and oriented perpendicular to the longitudinal direction;
a ground electrode disposed on, and in physical contact with, the piezoelectric thin film and oriented perpendicular to the longitudinal direction, wherein the ground electrode is separated from the signal electrode by a gap comprising a longitudinal distance and in which the acoustic wave resonates; and
a release window formed within the piezoelectric thin film adjacent to the ground electrode.