US 11,722,098 B2
Vibrator and oscillator
Atsushi Matsuo, Shiojiri (JP); and Ryuta Nishizawa, Nagano (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Mar. 10, 2022, as Appl. No. 17/691,410.
Claims priority of application No. 2021-040000 (JP), filed on Mar. 12, 2021.
Prior Publication US 2022/0294392 A1, Sep. 15, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H03B 5/04 (2006.01); H03B 5/36 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H10N 30/20 (2023.01)
CPC H03B 5/04 (2013.01) [H03B 5/36 (2013.01); H03H 9/13 (2013.01); H03H 9/17 (2013.01); H10N 30/2041 (2023.02)] 15 Claims
OG exemplary drawing
 
1. A vibrator comprising:
a vibration element that includes
a crystal substrate that includes
a first vibration portion,
a second vibration portion that is provided on one side of the first vibration portion in a first direction, and
a third vibration portion that is provided on the one side and that is provided side by side with the second vibration portion along a second direction orthogonal to the first direction,
a pair of first excitation electrodes formed at two main surfaces of the crystal substrate in the first vibration portion,
a pair of second excitation electrodes that sandwich the second vibration portion in a thickness direction of the crystal substrate in the second vibration portion, in which at least one second excitation electrode of the pair of second excitation electrodes is formed at a first inclined surface that is inclined with respect to the two main surfaces, and
a pair of third excitation electrodes that sandwich the third vibration portion in the thickness direction of the crystal substrate in the third vibration portion, in which at least one third excitation electrode of the pair of third excitation electrodes is formed at a second inclined surface, the second inclined surface being inclined with respect to the two main surfaces and the second inclined surface being inclined with respect to the first inclined surface; and
a package that houses the vibration element, wherein
the vibration element includes a fixing portion to be fixed to the package, and
the fixing portion is provided between the first vibration portion and the second and third vibration portions.