CPC H03B 1/02 (2013.01) [H03B 5/326 (2013.01); H03H 9/0504 (2013.01); H03H 9/08 (2013.01); H03L 1/028 (2013.01); H03L 1/04 (2013.01); H05B 1/023 (2013.01); H05B 3/06 (2013.01)] | 13 Claims |
1. A system, comprising:
a bulk acoustic wave (BAW) resonator;
a BAW die;
a first heater configured to heat the BAW resonator, wherein the first heater is controlled by a first control loop;
a circuit coupled to the BAW resonator; and
a second heater configured to heat the circuit, wherein the second heater is controlled by a second control loop,
wherein the BAW resonator and the first heater are directly coupled to each other and anchored to a portion of the BAW die such that the BAW resonator is spaced from the BAW die and the first heater partially encloses the BAW die.
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