US 11,721,947 B2
Optical compensation system for laser beam and excimer laser annealing device
Sangho Jeon, Beijing (CN); Junsung Kang, Beijing (CN); Zhaoli Lu, Beijing (CN); Songlin Liu, Beijing (CN); Ruoyao Li, Beijing (CN); and Hailan Piao, Beijing (CN)
Assigned to Chongqing BOE Display Technology Co., Ltd., Chongqing (CN); and BOE Technology Group Co., Ltd., Beijing (CN)
Filed by Chongqing BOE Display Technology Co., Ltd., Chongqing (CN); and BOE Technology Group Co., Ltd., Beijing (CN)
Filed on Sep. 28, 2021, as Appl. No. 17/488,078.
Claims priority of application No. 202011050289.X (CN), filed on Sep. 29, 2020.
Prior Publication US 2022/0102934 A1, Mar. 31, 2022
Int. Cl. H01S 3/00 (2006.01); H01S 3/13 (2006.01); H01S 3/22 (2006.01); H01S 3/225 (2006.01)
CPC H01S 3/13 (2013.01) [H01S 3/0071 (2013.01); H01S 3/2207 (2013.01); H01S 3/225 (2013.01)] 12 Claims
OG exemplary drawing
 
1. An optical compensation system for a laser beam, comprising a laser source, a beam splitter and a reversion assembly, wherein the laser beam emitted by the laser source enters the beam splitter, and is divided by the beam splitter into a first light beam and a second light beam having different transmission paths, and the second light beam is reversed and reflected by the reversion assembly, enters the beam splitter, and exits from the beam splitter together with the first light beam,
wherein an asymmetry of the second light beam reversed by the reversion assembly is different from an asymmetry of the first light beam;
wherein a part of the laser beam passes through the beam splitter, to form the first light beam, the other part of the laser beam is reflected by the beam splitter, to form the second light beam, the reversion assembly comprises at least two reflective mirrors, and the second light beam is sequentially reflected by the at least two reflective mirrors, enters the beam splitter, and exits from the beam splitter together with the first light beam;
wherein the reversion assembly comprises a first reflective mirror, a second reflective mirror and a third reflective mirror, the second light beam is sequentially reflected by the first reflective mirror, the second reflective mirror and the third reflective mirror, enters the beam splitter, and is reflected by the beam splitter, to transmit together with the first light beam; wherein orthographic projections of the first reflective mirror, the second reflective mirror and the third reflective mirror onto a same plane form a triangle-like shape, and an orthographic projection of the beam splitter onto the same plane crosses a line connecting any point of an orthographic projection of the first reflective mirror onto the same plane and any point of an orthographic projection of the third reflective mirror onto the same plane;
wherein a transmission direction of the laser beam is the same as a transmission direction of the first light beam and the second light beam together exiting from the beam splitter.