US 11,721,801 B2
Low resistance composite silicon-based electrode
John Collins, Tarrytown, NY (US); Teodor Krassimirov Todorov, Yorktown Heights, NY (US); Ali Afzali-Ardakani, Ossining, NY (US); Joel P. de Souza, Putam Valley, NY (US); and Devendra K. Sadana, Pleasantville, NY (US)
Assigned to International Business Machines Corporation, Armonk, Armonk, NY (US)
Filed by International Business Machines Corporation, Armonk, NY (US)
Filed on Aug. 17, 2020, as Appl. No. 16/994,813.
Prior Publication US 2022/0052316 A1, Feb. 17, 2022
Int. Cl. H01M 4/1395 (2010.01); H01L 21/02 (2006.01); H01M 4/36 (2006.01); H01M 4/38 (2006.01); H01M 4/40 (2006.01)
CPC H01M 4/1395 (2013.01) [H01L 21/02123 (2013.01); H01M 4/366 (2013.01); H01M 4/386 (2013.01); H01M 4/405 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An energy storage device comprising:
a composite electrode comprising:
a silicon-based electrode;
a semi-dielectric layer directly disposed on the silicon-based electrode, the semi-dielectric layer having a semi-dielectric layer thickness between 15 nanometers (nm) and 30 nm;
a molten-ion conductive layer disposed on the semi-dielectric layer, the molten-ion conductive layer and semi-dielectric layer forming a layer pair, the molten-ion conductive layer being made of a lithium containing salt that is highly conductive to lithium ions, the layer pair being on a trench bottom of a trench in the silicon-based electrode;
an anode disposed on the composite electrode and within the trench;
an electrolyte layer disposed on the anode;
a cathode electrode disposed on the electrolyte layer; and
a separator layer preventing electrode flow between the anode and the cathode, wherein the composite electrode has a resistivity less than 40 ohm-cm2.