US 11,721,797 B2
Vertical solid-state devices
Gholamreza Chaji, Waterloo (CA)
Assigned to VueReal Inc., Waterloo (CA)
Filed by VueReal Inc., Waterloo (CA)
Filed on Oct. 19, 2021, as Appl. No. 17/504,983.
Application 17/013,381 is a division of application No. 15/942,154, filed on Mar. 30, 2018, abandoned.
Application 17/504,983 is a continuation of application No. 17/013,381, filed on Sep. 4, 2020, granted, now 11,183,623.
Claims priority of provisional application 62/479,038, filed on Mar. 30, 2017.
Claims priority of provisional application 62/533,394, filed on Jul. 17, 2017.
Claims priority of application No. CA 2986412 (CA), filed on Nov. 14, 2017; and application No. CA 2987165 (CA), filed on Nov. 30, 2017.
Prior Publication US 2022/0037573 A1, Feb. 3, 2022
Int. Cl. H01L 27/12 (2006.01); H01L 33/62 (2010.01); H01L 33/00 (2010.01); H01L 25/075 (2006.01); H01L 25/16 (2023.01); H01L 27/15 (2006.01); H01L 33/06 (2010.01); H01L 33/32 (2010.01); H01L 33/50 (2010.01)
CPC H01L 33/62 (2013.01) [H01L 25/0753 (2013.01); H01L 25/167 (2013.01); H01L 27/124 (2013.01); H01L 27/1266 (2013.01); H01L 27/153 (2013.01); H01L 33/0093 (2020.05); H01L 33/06 (2013.01); H01L 25/0756 (2013.01); H01L 33/007 (2013.01); H01L 33/32 (2013.01); H01L 33/502 (2013.01); H01L 33/505 (2013.01); H01L 2933/0041 (2013.01); H01L 2933/0066 (2013.01)] 2 Claims
OG exemplary drawing
 
1. A method of fabricating an optoelectronic device, including an array of micro devices, comprising:
forming a device layer structure, including a monolithic active layer, on a substrate;
forming an array of first contacts on the device layer structure defining the array of micro devices;
mounting the array of first contacts to a backplane comprising a driving circuit which controls current flowing into the array of micro devices, and an array of pads connected to the driving circuit;
removing the substrate; and
forming grooves on a conductive layer to adjust a device definition.