CPC H01L 33/62 (2013.01) [H01L 25/0753 (2013.01); H01L 25/167 (2013.01); H01L 27/124 (2013.01); H01L 27/1266 (2013.01); H01L 27/153 (2013.01); H01L 33/0093 (2020.05); H01L 33/06 (2013.01); H01L 25/0756 (2013.01); H01L 33/007 (2013.01); H01L 33/32 (2013.01); H01L 33/502 (2013.01); H01L 33/505 (2013.01); H01L 2933/0041 (2013.01); H01L 2933/0066 (2013.01)] | 2 Claims |
1. A method of fabricating an optoelectronic device, including an array of micro devices, comprising:
forming a device layer structure, including a monolithic active layer, on a substrate;
forming an array of first contacts on the device layer structure defining the array of micro devices;
mounting the array of first contacts to a backplane comprising a driving circuit which controls current flowing into the array of micro devices, and an array of pads connected to the driving circuit;
removing the substrate; and
forming grooves on a conductive layer to adjust a device definition.
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