CPC H01L 33/0093 (2020.05) [B32B 43/006 (2013.01); G02B 7/023 (2013.01); Y10T 156/1158 (2015.01); Y10T 156/1917 (2015.01)] | 20 Claims |
1. A mass transfer apparatus, comprising:
a beam emission assembly configured to emit a beam;
a rotating lens configured to:
receive the beam emitted from the beam emission assembly; and
refract the beam to a substrate carrying a micro light emitting diode (LED) chip to be stripped; and
a rotating lens adjusting assembly connected with the rotating lens and configured to:
control the rotating lens to perform peripheral rotation; and
adjust a rotation radius of the rotating lens.
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