CPC H01L 27/14625 (2013.01) [G03F 1/38 (2013.01); G03F 1/42 (2013.01); H01L 27/14605 (2013.01); H01L 27/14687 (2013.01)] | 20 Claims |
1. A reticle set for patterning an image sensor die, the reticle set comprising:
a center tile having a first pattern image associated with pixel circuitry, the center tile having a first length along a first dimension; and
a peripheral tile having a second pattern image associated with control circuitry for the pixel circuitry, the second pattern image containing first and second pattern image portions associated with the control circuitry for the pixel circuitry that have respective lengths summing to a second length of the peripheral tile along the first dimension, wherein a ratio of the first length of the center tile to the second length of the peripheral tile is a non-integer ratio.
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