US 11,721,575 B2
Substrate support unit and substrate treating apparatus having the same
Inhwang Park, Suwon-si (KR); Gui Su Park, Cheonan-si (KR); Young Hun Lee, Cheonan-si (KR); Youngseop Choi, Cheonan-si (KR); Seung Hoon Oh, Cheonan-si (KR); Jonghyeon Woo, Asan-si (KR); and Jin Mo Jae, Geoje-si (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-Do (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Jun. 19, 2020, as Appl. No. 16/906,237.
Claims priority of application No. 10-2019-0074238 (KR), filed on Jun. 21, 2019.
Prior Publication US 2020/0402836 A1, Dec. 24, 2020
Int. Cl. H01L 21/687 (2006.01); B08B 3/04 (2006.01); H01L 21/67 (2006.01)
CPC H01L 21/68785 (2013.01) [B08B 3/04 (2013.01); H01L 21/67051 (2013.01); H01L 21/67126 (2013.01); H01L 21/68792 (2013.01)] 9 Claims
OG exemplary drawing
 
1. An apparatus for supporting a substrate, the apparatus comprising:
a rotatable spin head configured to support the substrate;
a hollow shaft connected with the spin head and configured to transmit torque to the spin head;
a nozzle assembly disposed in an interior space of the spin head so as not to rotate and configured to supply a treatment liquid to a backside of the substrate; and
a sealing member configured to seal a gap between the spin head and the nozzle assembly using a magnetic fluid,
wherein the sealing member includes,
a magnetic body installed on a first member, the first member being one of a main body of the nozzle assembly and the spin head configured to surround the main body,
pole pieces installed around the magnetic body and configured to transmit a magnetic force of the magnetic body to a second member, the second member being the other of the main body of the nozzle assembly and the spin head, and
a magnetic fluid provided between the second member and the pole pieces and configured to seal a gap between the second member and the pole pieces by the magnetic force transmitted by the pole pieces.