CPC H01L 21/68785 (2013.01) [B08B 3/04 (2013.01); H01L 21/67051 (2013.01); H01L 21/67126 (2013.01); H01L 21/68792 (2013.01)] | 9 Claims |
1. An apparatus for supporting a substrate, the apparatus comprising:
a rotatable spin head configured to support the substrate;
a hollow shaft connected with the spin head and configured to transmit torque to the spin head;
a nozzle assembly disposed in an interior space of the spin head so as not to rotate and configured to supply a treatment liquid to a backside of the substrate; and
a sealing member configured to seal a gap between the spin head and the nozzle assembly using a magnetic fluid,
wherein the sealing member includes,
a magnetic body installed on a first member, the first member being one of a main body of the nozzle assembly and the spin head configured to surround the main body,
pole pieces installed around the magnetic body and configured to transmit a magnetic force of the magnetic body to a second member, the second member being the other of the main body of the nozzle assembly and the spin head, and
a magnetic fluid provided between the second member and the pole pieces and configured to seal a gap between the second member and the pole pieces by the magnetic force transmitted by the pole pieces.
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