CPC H01L 21/6833 (2013.01) [H01J 37/32642 (2013.01)] | 11 Claims |
1. A member for an electrostatic chuck configured to suck a target object by using an electrostatic force,
wherein a lanthanoid element is included in a part of a material of the member,
wherein when electromagnetic waves in a wavelength region shorter than 400 nm are irradiated, the member emits light in a wavelength region different from the wavelength region of the electromagnetic waves,
wherein the member is formed of ceramic including the lanthanoid element and having aluminum oxide as a main component, and
wherein 90% or more of the ceramic consists of a corundum phase.
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