US 11,721,574 B2
Member for electrostatic chuck and electrostatic chuck
Michio Horiuchi, Nagano (JP); and Masaya Tsuno, Matsumoto (JP)
Assigned to SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano (JP)
Filed by SHINKO ELECTRIC INDUSTRIES CO., LTD., Nagano (JP)
Filed on Jul. 21, 2021, as Appl. No. 17/381,790.
Claims priority of application No. 2020-132023 (JP), filed on Aug. 3, 2020.
Prior Publication US 2022/0037187 A1, Feb. 3, 2022
Int. Cl. H01L 21/683 (2006.01); H01J 37/32 (2006.01)
CPC H01L 21/6833 (2013.01) [H01J 37/32642 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A member for an electrostatic chuck configured to suck a target object by using an electrostatic force,
wherein a lanthanoid element is included in a part of a material of the member,
wherein when electromagnetic waves in a wavelength region shorter than 400 nm are irradiated, the member emits light in a wavelength region different from the wavelength region of the electromagnetic waves,
wherein the member is formed of ceramic including the lanthanoid element and having aluminum oxide as a main component, and
wherein 90% or more of the ceramic consists of a corundum phase.