CPC H01L 21/67282 (2013.01) [H01L 21/681 (2013.01); H01L 23/544 (2013.01); H01L 2223/54493 (2013.01)] | 16 Claims |
1. A wafer notch leveling device, comprising:
a body, having a support portion and a pivot portion being provided at each terminal of the body, the pivot portion pivotally connects a plurality of supporting arms;
a first rotating portion, having a driving wheel and an auxiliary wheel;
a positioning portion, disposing with a positioning part and a detaching fulcrum;
a power portion, having a first power member electrically connected with the pivot portion for driving the supporting arms to move up and down, a second power member electrically connected with the first rotating portion for rotating and a third power member electrically connected with the positioning portion for moving up and down;
a control unit, electrically connecting with the power portion for controlling setup and operation of all portions;
wherein the supporting arms further comprise a first directional supporting arm and a second directional supporting arm.
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