US 11,721,569 B2
Method and apparatus for determining a position of a ring within a process kit
Andrew Myles, Sunnyvale, CA (US); Andreas Schmid, Meyriez (CH); Phillip A. Criminale, Livermore, CA (US); and Steven E. Babayan, Los Altos, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jun. 18, 2021, as Appl. No. 17/352,097.
Prior Publication US 2022/0406635 A1, Dec. 22, 2022
Int. Cl. H01L 21/67 (2006.01); G01B 11/27 (2006.01); G01B 9/02002 (2022.01); G05B 23/02 (2006.01); H01L 21/687 (2006.01)
CPC H01L 21/67259 (2013.01) [G01B 9/02002 (2013.01); G01B 11/272 (2013.01); G05B 23/0205 (2013.01); H01L 21/68735 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A sensor assembly for a substrate processing chamber, comprising:
a housing having a top surface, a bottom surface opposite the top surface, and a plurality of sidewalls connecting the top surface to the bottom surface, the housing further comprising a recess in the top surface, the recess forming an interior volume within the housing;
a bias member;
a contact member disposed on the bias member, wherein the bias member and contact member are disposed within the recess; and
a sensor configured to detect a displacement of the contact member, the displacement of the contact member corresponding to a relative position of an edge ring.