CPC H01L 21/67259 (2013.01) [G01B 9/02002 (2013.01); G01B 11/272 (2013.01); G05B 23/0205 (2013.01); H01L 21/68735 (2013.01)] | 20 Claims |
1. A sensor assembly for a substrate processing chamber, comprising:
a housing having a top surface, a bottom surface opposite the top surface, and a plurality of sidewalls connecting the top surface to the bottom surface, the housing further comprising a recess in the top surface, the recess forming an interior volume within the housing;
a bias member;
a contact member disposed on the bias member, wherein the bias member and contact member are disposed within the recess; and
a sensor configured to detect a displacement of the contact member, the displacement of the contact member corresponding to a relative position of an edge ring.
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