US 11,721,568 B2
Substrate transfer apparatus
Sangho Jang, Cheonan-si (KR); Dongsoo Lee, Cheonan-si (KR); Anhi Pyun, Asan-si (KR); Jinyi Lee, Asan-si (KR); and Sukbyung Chae, Cheonan-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR)
Filed on Aug. 18, 2020, as Appl. No. 16/996,116.
Claims priority of application No. 10-2019-0170205 (KR), filed on Dec. 18, 2019.
Prior Publication US 2021/0193491 A1, Jun. 24, 2021
Int. Cl. B65G 47/52 (2006.01); B65G 15/14 (2006.01); B65G 27/16 (2006.01); B65G 39/18 (2006.01); H01L 21/67 (2006.01); B65G 41/00 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67259 (2013.01) [B65G 15/14 (2013.01); B65G 27/16 (2013.01); B65G 39/18 (2013.01); B65G 41/002 (2013.01); B65G 47/52 (2013.01); H01L 21/67288 (2013.01); H01L 21/67706 (2013.01); H01L 21/67718 (2013.01); B65G 2203/0208 (2013.01); B65G 2203/042 (2013.01); B65G 2203/044 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A substrate transfer apparatus comprising:
a first transfer apparatus configured to transfer a substrate in a first direction;
a second transfer apparatus configured to receive the substrate from the first transfer apparatus, the second transfer apparatus comprising a substrate carrier configured to support the substrate and a substrate carrier driver configured to move the substrate carrier;
a sensor configured to detect an abnormal transfer of the substrate from the first transfer apparatus to the second transfer apparatus and generate a detection signal corresponding to the abnormal transfer of the substrate, and wherein the sensor is further configured to generate different detection signals based on different types of the abnormal transfer of the substrate, respectively;
a swing apparatus configured to swing the substrate carrier; and
a controller connected to the sensor and the swing apparatus and configured to control the swing apparatus based on the detection signal of the sensor, wherein the controller is configured to control the swing apparatus to perform different motions to correct the different types of the abnormal transfer, respectively.