CPC H01L 21/67253 (2013.01) [C23C 14/546 (2013.01); C23C 16/45565 (2013.01); G01B 17/025 (2013.01); H01L 21/6719 (2013.01); H01L 22/12 (2013.01); C23C 14/042 (2013.01); C23C 14/12 (2013.01)] | 18 Claims |
1. A process chamber comprising:
a chamber body;
a substrate support disposed in the chamber body;
a lid disposed over the chamber body; and
a sensor assembly coupled to the chamber body at a lower portion of the sensor assembly, the sensor assembly coupled to the lid at an upper portion of the sensor assembly, the sensor assembly further comprising:
one or more apertures disposed through one or more sides of the sensor assembly;
one or more sensors disposed in the sensor assembly through the one or more of the apertures; and
a shelf, the shelf comprising grooves substantially aligned with the one or more apertures and configured to receive each of the one or more sensors.
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