CPC H01L 21/67017 (2013.01) [F04B 49/00 (2013.01); G01R 29/12 (2013.01); F04B 2203/00 (2013.01)] | 20 Claims |
1. A method for supplying chemical solutions, comprising:
providing a first electrostatic probe to a chemical supply system, wherein the chemical supply system comprises a chemical storage tank, a pipeline, a pump connected to the chemical storage tank and the pipeline, a first electrostatic probe coupled to the pump, and a control unit coupled to the first electrostatic probe;
pumping a chemical solution from the chemical storage tank into the pipeline by the pump;
providing a measurement of an electrostatic voltage of the pump by the first electrostatic probe to the control unit during the pumping of the chemical solution; and
adjusting a parameter of the pump by the control unit according to the measurement of the electrostatic voltage of the pump.
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