US 11,721,561 B2
System and method for supplying chemical solution
Chih-Chiang Tseng, Hsinchu County (TW); Ming-Lee Lee, Kaohsiung (TW); and Chiang Jen Chen, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Jul. 17, 2020, as Appl. No. 16/932,649.
Prior Publication US 2022/0020608 A1, Jan. 20, 2022
Int. Cl. H01L 21/67 (2006.01); G01R 29/12 (2006.01); F04B 49/00 (2006.01)
CPC H01L 21/67017 (2013.01) [F04B 49/00 (2013.01); G01R 29/12 (2013.01); F04B 2203/00 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for supplying chemical solutions, comprising:
providing a first electrostatic probe to a chemical supply system, wherein the chemical supply system comprises a chemical storage tank, a pipeline, a pump connected to the chemical storage tank and the pipeline, a first electrostatic probe coupled to the pump, and a control unit coupled to the first electrostatic probe;
pumping a chemical solution from the chemical storage tank into the pipeline by the pump;
providing a measurement of an electrostatic voltage of the pump by the first electrostatic probe to the control unit during the pumping of the chemical solution; and
adjusting a parameter of the pump by the control unit according to the measurement of the electrostatic voltage of the pump.