US 11,721,556 B2
Article manufacturing method, film forming method, mold manufacturing method, exposure apparatus, information processing method, and non-transitory computer-readable medium storing a program
Hiroshi Kurosawa, Utsunomiya (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jul. 22, 2020, as Appl. No. 16/935,822.
Claims priority of application No. 2019-141682 (JP), filed on Jul. 31, 2019.
Prior Publication US 2021/0035808 A1, Feb. 4, 2021
Int. Cl. H01L 21/308 (2006.01); G03F 7/20 (2006.01); G03F 7/00 (2006.01); H01L 21/027 (2006.01); H01L 21/66 (2006.01)
CPC H01L 21/3086 (2013.01) [G03F 7/0002 (2013.01); G03F 7/70625 (2013.01); H01L 21/0274 (2013.01); H01L 22/12 (2013.01)] 28 Claims
OG exemplary drawing
 
1. An article manufacturing method comprising:
acquiring image surface shape information of an image surface shape of an exposure apparatus configured to transfer a pattern of an original to a resist layer;
a first formation step of forming a focus compensation film on a substrate, the focus compensation film having a top surface;
a second formation step of forming the resist layer on the focus compensation film; and
a transfer step of transferring the pattern of the original to the resist layer using the exposure apparatus,
wherein in the first formation step, the focus compensation film is formed based on the acquired image surface shape information such that the top surface of the focus compensation film has a shape that corresponds to the image surface shape of the exposure apparatus.