US 11,721,526 B2
System and method of power generation with phase linked solid-state generator modules
Francesco Braghiroli, Reggio Emilia (IT)
Assigned to MKS Instruments, Inc., Andover, MA (US)
Filed by MKS Instruments, Inc., Andover, MA (US)
Filed on May 22, 2020, as Appl. No. 16/881,458.
Claims priority of provisional application 62/855,136, filed on May 31, 2019.
Prior Publication US 2020/0381218 A1, Dec. 3, 2020
Int. Cl. H01J 37/32 (2006.01); H05H 1/46 (2006.01); H03L 7/099 (2006.01)
CPC H01J 37/32311 (2013.01) [H01J 37/32201 (2013.01); H01J 37/32293 (2013.01); H01J 37/32798 (2013.01); H03L 7/099 (2013.01); H05H 1/46 (2013.01); H01J 2237/24564 (2013.01); H01J 2237/24592 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of generating power with a power generation system comprising:
generating a plurality of outputs with a plurality of solid state generator modules; and
combining, in a combiner, the outputs of the solid state generator modules from a plurality of channels using a phase optimization technique to generate an in phase combined output power,
wherein the solid state generator modules are connected in a phase lock loop (PLL) such that the outputs of the solid state generator modules have a shared phase.