US 11,721,521 B2
Multi-beam inspection apparatus with improved detection performance of signal electrons
Weiming Ren, San Jose, CA (US); Xuedong Liu, San Jose, CA (US); Xuerang Hu, San Jose, CA (US); and Zhong-wei Chen, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Mar. 17, 2022, as Appl. No. 17/697,842.
Application 17/697,842 is a continuation of application No. 17/146,409, filed on Jan. 11, 2021, granted, now 11,282,675.
Application 17/146,409 is a continuation of application No. 16/295,971, filed on Mar. 7, 2019, granted, now 10,892,138, issued on Jan. 12, 2021.
Claims priority of provisional application 62/641,204, filed on Mar. 9, 2018.
Prior Publication US 2022/0319808 A1, Oct. 6, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/31 (2006.01); H01J 37/14 (2006.01); H01J 37/30 (2006.01); H01J 37/28 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); H01J 37/317 (2006.01); H01J 37/147 (2006.01)
CPC H01J 37/3177 (2013.01) [B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01J 37/1471 (2013.01); H01J 37/1472 (2013.01); H01J 37/28 (2013.01); H01J 37/3007 (2013.01); H01J 2237/151 (2013.01); H01J 2237/1501 (2013.01); H01J 2237/1508 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/2804 (2013.01); H01J 2237/2817 (2013.01)] 24 Claims
OG exemplary drawing
 
1. A method to form images of a sample using an electro-optical system comprising:
generating a magnetic field to immerse a surface of the sample;
projecting a plurality of primary electron beams onto the surface of the sample by a primary projection imaging system, wherein the plurality of primary electron beams pass through the magnetic field and generate a plurality of secondary electron beams from the sample; and
projecting, by a secondary imaging system, the plurality of secondary electron beams onto an electron detection device to obtain the images, wherein at least some of the plurality of secondary electron beams are deflected for creating a crossover area and are trimmed at or at least near to the crossover area.