CPC H01J 37/3177 (2013.01) [B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); H01J 37/1471 (2013.01); H01J 37/1472 (2013.01); H01J 37/28 (2013.01); H01J 37/3007 (2013.01); H01J 2237/151 (2013.01); H01J 2237/1501 (2013.01); H01J 2237/1508 (2013.01); H01J 2237/2446 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/2804 (2013.01); H01J 2237/2817 (2013.01)] | 24 Claims |
1. A method to form images of a sample using an electro-optical system comprising:
generating a magnetic field to immerse a surface of the sample;
projecting a plurality of primary electron beams onto the surface of the sample by a primary projection imaging system, wherein the plurality of primary electron beams pass through the magnetic field and generate a plurality of secondary electron beams from the sample; and
projecting, by a secondary imaging system, the plurality of secondary electron beams onto an electron detection device to obtain the images, wherein at least some of the plurality of secondary electron beams are deflected for creating a crossover area and are trimmed at or at least near to the crossover area.
|