CPC H01J 37/28 (2013.01) [H01J 37/222 (2013.01); H01J 37/265 (2013.01); H01J 2237/226 (2013.01); H01J 2237/2802 (2013.01)] | 20 Claims |
1. A system comprising:
a compound sparse sampling pattern generator configured to generate:
at least two primary carrier signals defining at least a two dimensional space-filling curve path within a scan boundary; and
at least two secondary signals that modulate the at least two primary carrier signals in a randomized fashion in the at least two dimensions of the at least the two dimensional space-filling curve path within the scan boundary; and
a controller comprising a non-transitory computer-readable medium, the controller being coupled to the compound sparse sampling pattern generator and configured to receive the at least two primary carrier signals and the at least two secondary signals that modulate the at least two primary carrier signals, wherein the controller further comprises at least one hardware output via which the at least two primary carrier signals and the at least two secondary signals that modulate the at least two primary carrier signals are provided to at least one scan input of a scanning probe.
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