CPC H01J 35/153 (2019.05) [H05G 1/025 (2013.01); H01J 2235/1216 (2013.01); H01J 2235/1245 (2013.01); H01J 2235/1291 (2013.01)] | 10 Claims |
1. An X-ray module comprising:
a housing;
an electron gun that emits an electron beam inside the housing;
a target disposed inside the housing and fixed to the housing, to generate an X-ray when the electron beam is incident on the target; and
a deflection unit including a permanent magnet and disposed outside the housing, to deflect the electron beam by means of a magnetic force of the permanent magnet,
wherein the deflection unit includes a heat insulating member disposed at least between the permanent magnet and the housing, and
a thermal conductivity of the heat insulating member is lower than a thermal conductivity of the permanent magnet.
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