US 11,721,011 B2
Information processing apparatus, film forming apparatus, method of manufacturing article, and non-transitory computer-readable storage medium
Takahiro Nakayama, Tochigi (JP); and Yuichiro Oguchi, Tokyo (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Jul. 20, 2021, as Appl. No. 17/380,087.
Claims priority of application No. 2020-127639 (JP), filed on Jul. 28, 2020.
Prior Publication US 2022/0036540 A1, Feb. 3, 2022
Int. Cl. G06T 7/00 (2017.01); G06F 3/14 (2006.01); H04N 7/18 (2006.01); G06V 40/20 (2022.01)
CPC G06T 7/0004 (2013.01) [G06F 3/14 (2013.01); G06V 40/20 (2022.01); H04N 7/18 (2013.01); G06T 2207/20076 (2013.01); G06T 2207/30164 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An information processing apparatus comprising:
an obtainer configured to, in a process of supplying a curable composition onto a substrate or a mold and forming a film of the curable composition in a space between the substrate and the mold, obtain a plurality of captured images by temporally capturing an image of the curable composition;
a generator configured to generate a plurality of predicted images by predicting a temporal behavior of the curable composition in the process, each of the plurality of predicted images representing a prediction result of a behavior of the curable composition on the substrate in the process; and
a display controller configured to
select a target captured image to be displayed on a display unit among the plurality of captured images and a target predicted image to be displayed on the display unit among the plurality of predicted images so that the target captured image and the target predicted image are synchronized with each other with respect to an elapsed time of the process, and
display, on the display unit, the target captured image and the target predicted image to be comparable to each other.