CPC G03F 7/70858 (2013.01) | 20 Claims |
1. A method, comprising:
storing a carrier containing photoresist in a storage, a first temperature of the storage being less than about 0° C.;
recording first environmental data and first safety data associated with the photoresist by a transport vehicle that transits the carrier from a materials supplier to the storage;
recording second environmental data of the storage to a database while the photoresist is in the storage;
recording second safety data of the carrier to the database while the photoresist is in the storage;
recording acclimation time of the photoresist at a staging area having a second temperature of about 20° C. to about 25° C.;
generating a forecast of expiration of the photoresist based on the first environmental data, the second environmental data, the first safety data, the second safety data and the acclimation time;
receiving a request for the photoresist from a semiconductor fabrication tool; and
providing the carrier to the semiconductor fabrication tool based on the forecasted expiration of the photoresist.
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