US 11,720,032 B2
Process tool and an inspection method
Raphael Nico Johan Stegen, Eindhoven (NL); Erik Henricus Egidius Catharina Eummelen, Veldhoven (NL); Christianus Wilhelmus Johannes Berendsen, Eindhoven (NL); Theodorus Wilhelmus Polet, Geldrop (NL); and Giovanni Luca Gattobigio, Eindhoven (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 17/273,758
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Aug. 30, 2019, PCT No. PCT/EP2019/073183
§ 371(c)(1), (2) Date Mar. 5, 2021,
PCT Pub. No. WO2020/064265, PCT Pub. Date Apr. 2, 2020.
Claims priority of application No. 18196191 (EP), filed on Sep. 24, 2018.
Prior Publication US 2021/0349397 A1, Nov. 11, 2021
Int. Cl. G03F 7/20 (2006.01); G03F 7/00 (2006.01); G01N 21/88 (2006.01)
CPC G03F 7/7065 (2013.01) [G01N 21/88 (2013.01); G03F 7/70341 (2013.01); G03F 7/70716 (2013.01); G01N 2201/0636 (2013.01); G01N 2201/103 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A process tool for processing production substrates, the process tool comprising:
a movable stage configured to perform movements in an X-Y plane;
an imaging sensor system mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and
a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position the imaging sensor system is arranged to capture an image of at least part of a component to be inspected, the component being other than a substrate, or a part thereof, handled by the process tool.