CPC G03F 7/7065 (2013.01) [G01N 21/88 (2013.01); G03F 7/70341 (2013.01); G03F 7/70716 (2013.01); G01N 2201/0636 (2013.01); G01N 2201/103 (2013.01)] | 20 Claims |
1. A process tool for processing production substrates, the process tool comprising:
a movable stage configured to perform movements in an X-Y plane;
an imaging sensor system mounted to a fixed part of the tool and having an optical axis substantially parallel to the X-Y plane; and
a mirror mounted on the movable stage and oriented at a predetermined angle of inclination to the X-Y plane so that by moving the movable stage to a predetermined position the imaging sensor system is arranged to capture an image of at least part of a component to be inspected, the component being other than a substrate, or a part thereof, handled by the process tool.
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