CPC G03F 7/705 (2013.01) [G03F 7/7065 (2013.01); G03F 7/70625 (2013.01); G03F 7/70633 (2013.01); G06T 7/12 (2017.01); G06T 7/149 (2017.01); G06T 7/60 (2013.01); G06T 2207/10061 (2013.01); G06T 2207/20161 (2013.01); G06T 2207/30148 (2013.01)] | 20 Claims |
1. A non-transitory computer program product comprising machine-readable instructions therein, the instructions, upon execution by a computer processor system, configured to cause the computer processor system to at least:
process data of a noisy inspection image containing an object representing a structure created by a semiconductor process, with one or more numerical techniques; and
obtain, based on the processing of the inspection image, a high resolution mathematical representation or numerical function corresponding to the structure, wherein the mathematical representation or numerical function is configured for a classification of a defect, for an estimation of a defect, for a monitoring of a process, and/or for a controlling of a process.
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