CPC G03F 7/7015 (2013.01) [G03F 7/70133 (2013.01)] | 20 Claims |
1. An illumination optical unit configured to guide illumination light into an object field, the illumination optical unit comprising:
a field facet mirror comprising a plurality of field facets;
a pupil facet mirror comprising a plurality of pupil facets configured to overlay field facet images of the field facets in the object field and so that a field facet imaging channel of the illumination light is guided via any one field facet and any one pupil facet; and
a measurement field illumination device comprising a displacement actuator,
wherein:
the illumination optical unit is configured so that a measurement field has a greater extent along one first field dimension than any one of the field facet images;
the measurement field illumination device is configured to influence guidance of the illumination light via the field facet imaging channels so that the entire measurement field is illuminated via the field facet imaging channels; and
the displacement actuator is configured to displace an optical component configured to guide the illumination light between an illumination light source and the object field to sequentially illuminate the entire measurement field via the field facet imaging channels.
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