CPC G03F 7/0045 (2013.01) [C08L 25/08 (2013.01); C08L 33/06 (2013.01); G03F 7/0382 (2013.01); G03F 7/0392 (2013.01); G03F 7/2004 (2013.01); G03F 7/0048 (2013.01)] | 15 Claims |
1. A chemically amplified resist composition comprising a quencher and an acid generator, the quencher comprising an ammonium salt of an iodine or bromine-substituted phenol.
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