CPC G03F 1/70 (2013.01) [G03F 1/36 (2013.01); G06T 7/536 (2017.01); G06T 2207/10028 (2013.01); G06T 2207/30148 (2013.01)] | 20 Claims |
1. A method comprising:
obtaining a target shape on an image surface to be fabricated using a mask based on a design of an integrated circuit;
generating rays emanating from respective anchor points, the anchor points being on a boundary of the target shape or a boundary of a mask shape of the mask;
defining, for each ray of the rays, a distance between
a first intersection of the respective ray and the boundary of the target shape and
a second intersection of the respective ray and the boundary of the mask shape;
modifying, by one or more processors, the distance based on an error between the target shape and a resulting shape simulated to be on the image surface resulting from the mask shape; and
generating a mask design for the mask that is to be used to fabricate the target shape on the image surface based on the modified distance.
|