CPC G01Q 60/38 (2013.01) [G01Q 70/10 (2013.01); G01Q 70/16 (2013.01)] | 18 Claims |
1. A method of batch-fabricating an array of probe devices for a surface analysis instrument, the method including:
providing a wafer;
photolithographically forming a base and a cantilever for each probe device;
wherein the cantilever includes a built-in angle, θ, relative to the base; and
wherein the providing step includes bonding an off-axis wafer (111) with a substrate wafer.
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