CPC G01N 29/022 (2013.01) [H01L 41/1132 (2013.01); G01N 2291/0256 (2013.01); G01N 2291/02466 (2013.01); G01N 2291/0423 (2013.01); G01N 2291/0426 (2013.01)] | 22 Claims |
1. A device for determining information of a substance in a matter, comprising:
a first outermost layer being a substrate layer;
an inter-layer dielectric disposed on the substrate layer;
an electronic circuitry substantially formed in the inter-layer dielectric and includes a plurality of metal layers with at least one metal layer being used as an inner electrode;
a sensing instrument having at least one sensing component that includes a piezoelectric layer and the inner electrode that is positioned adjacent to an inner surface of the piezoelectric layer; and
a second outermost layer, disposed on the inter-layer dielectric, for binding to the substance;
wherein the sensing component allows the device to determine the information of the substance upon detecting presence of the substance at the second outermost layer.
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