US 11,719,669 B2
Device for determining information of a substance in a matter
Mohanraj Soundara Pandian, Kulim (MY); and Arjun Kumar Kantimahanti, Kulim (MY)
Assigned to Silterra Malaysia Sdn. Bhd., Kulim (MY)
Filed by Silterra Malaysia Sdn. Bhd., Kulim (MY)
Filed on Feb. 19, 2021, as Appl. No. 17/180,172.
Claims priority of application No. PI 2020002181 (MY), filed on Apr. 30, 2020.
Prior Publication US 2021/0341424 A1, Nov. 4, 2021
Int. Cl. G01N 29/02 (2006.01); H01L 41/113 (2006.01)
CPC G01N 29/022 (2013.01) [H01L 41/1132 (2013.01); G01N 2291/0256 (2013.01); G01N 2291/02466 (2013.01); G01N 2291/0423 (2013.01); G01N 2291/0426 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A device for determining information of a substance in a matter, comprising:
a first outermost layer being a substrate layer;
an inter-layer dielectric disposed on the substrate layer;
an electronic circuitry substantially formed in the inter-layer dielectric and includes a plurality of metal layers with at least one metal layer being used as an inner electrode;
a sensing instrument having at least one sensing component that includes a piezoelectric layer and the inner electrode that is positioned adjacent to an inner surface of the piezoelectric layer; and
a second outermost layer, disposed on the inter-layer dielectric, for binding to the substance;
wherein the sensing component allows the device to determine the information of the substance upon detecting presence of the substance at the second outermost layer.