US 11,719,664 B2
Electrical/optical multimodal sensor using multi-functional 3D nano-architecture materials and manufacturing method thereof
Yeon Sik Jung, Daejeon (KR); Hyeuk Jin Han, Daejeon (KR); Seunghee Cho, Daejeon (KR); and Gyurac Lee, Daejeon (KR)
Assigned to Korea Advanced Institute of Science and Technology, Daejeon (KR)
Filed by Korea Advanced Institute of Science and Technology, Daejeon (KR)
Filed on Aug. 27, 2019, as Appl. No. 16/552,120.
Claims priority of application No. 10-2019-0022222 (KR), filed on Feb. 26, 2019; and application No. 10-2019-0082940 (KR), filed on Jul. 10, 2019.
Prior Publication US 2020/0271609 A1, Aug. 27, 2020
Int. Cl. G01N 27/27 (2006.01); H01L 29/41 (2006.01); G01N 21/65 (2006.01); H01J 37/26 (2006.01)
CPC G01N 27/27 (2013.01) [G01N 21/658 (2013.01); H01L 29/413 (2013.01); H01J 37/26 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A method of manufacturing a multimodal sensor using a three-dimensional nanostructure, the method comprising:
forming multi-layered nanowires including a multifunctional material;
transferring the multi-layered nanowires, each including both a first functional material and a second functional material, simultaneously to form a plurality of layers, each layer comprising a single multi-layered nanowire conforming to one of a plurality of base patterns, on a target substrate to form the three-dimensional nanostructure;
heat-treating the three-dimensional nanostructure; and
forming electrode layers including a first electrode pattern and a second electrode pattern which are formed on both sides of the heat-treated three-dimensional nanostructure, respectively, to form the multimodal sensor,
wherein each of the multi-layered nanowires is formed by sequentially depositing the second functional material, the first functional material, and the second functional material on each of said base patterns, which are formed on a base substrate;
wherein forming the nanowires includes:
applying a material on a master substrate where a plurality of master patterns is formed, wherein the material is sufficiently soft to be molded by the plurality of master patterns;
separating the material from the master substrate using an adhesive film and forming the base substrate, which includes the base patterns each having a reverse shape of each of the master patterns;
depositing the first functional material on the base patterns; and
depositing the second functional material having properties different from the first functional material on the first functional material to form the nanowires; and
wherein the first electrode pattern and the second electrode pattern are electrically insulated from each other and are formed in an interdigitated type.