US 11,719,653 B1
Methods and systems for manufacturing superconductor devices
Faraz Najafi, Palo Alto, CA (US); and Chia-Jung Chung, Sunnyvale, CA (US)
Assigned to PSIQUANTUM CORP., Palo Alto, CA (US)
Filed by PsiQuantum Corp., Palo Alto, CA (US)
Filed on Sep. 18, 2019, as Appl. No. 16/575,282.
Claims priority of provisional application 62/734,942, filed on Sep. 21, 2018.
Int. Cl. H01L 39/24 (2006.01); G01N 23/207 (2018.01)
CPC G01N 23/2076 (2013.01) [H01L 39/2435 (2013.01); H01L 39/2438 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A method of manufacturing a superconductor, comprising:
manufacturing a first superconductor device;
characterizing the first superconductor device, including:
obtaining x-ray diffraction spectra of the first superconductor device; and
identifying a ratio of a first cubic phase peak to a second cubic phase peak in the x-ray diffraction spectra;
obtaining a second ratio corresponding to a second superconductor device;
adjusting a manufacturing parameter based on the identified ratio and the second ratio, wherein the manufacturing parameter corresponds to one or more of: a voltage source, a duty cycle, a pressure, and a plasma mixture; and
manufacturing a third superconductor device with the adjusted manufacturing parameter.