CPC G01N 21/6454 (2013.01) [G01N 21/6408 (2013.01); G01N 21/6428 (2013.01); H01L 27/14603 (2013.01); G01N 2021/6463 (2013.01)] | 19 Claims |
13. A method, comprising:
determining information about a sample that emits emission light in response to excitation light, the information comprising at least three members selected from a group comprising a characteristic wavelength of the emission light, a characteristic intensity of the emission light, a characteristic luminescence lifetime of the emission light, a characteristic pulse duration of the emission light and a characteristic interpulse duration of the emission light; and
identifying the sample at least in part by comparing the information about the sample of each of the three members to known information about a candidate matching sample.
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