US 11,719,596 B2
Gas leak sensing device, setting method for gas leak sensing, gas leak sensing method, and tangible medium
Akio Furuse, Tokyo (JP); and Satoru Sasaki, Tokyo (JP)
Assigned to COSMO INSTRUMENTS CO., LTD., Tokyo (JP)
Filed by COSMO INSTRUMENTS CO., LTD., Tokyo (JP)
Filed on Jul. 1, 2021, as Appl. No. 17/365,391.
Claims priority of application No. 2020-153483 (JP), filed on Sep. 14, 2020.
Prior Publication US 2022/0082469 A1, Mar. 17, 2022
Int. Cl. G01M 3/32 (2006.01); G01F 5/00 (2006.01)
CPC G01M 3/3263 (2013.01) [G01F 5/005 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A gas leak sensing device comprising:
a constant flow rate control valve that controls the supply of gas of a constant flow rate;
a pressurization control valve that controls the supply of gas at a test pressure;
a supply-side gas circuit connected with the constant flow rate control valve and the pressurization control valve;
a master-side gas circuit to be connected with a master;
a workpiece-side gas circuit to be connected with a workpiece;
an equal pressure valve that performs opening and closing between the supply-side gas circuit and the master-side gas circuit and opening and closing between the supply-side gas circuit and the workpiece-side gas circuit;
an exhaust valve that performs only opening and closing between the workpiece-side gas circuit and outside;
a test pressure sensor that detects a pressure in the supply-side gas circuit;
a differential pressure sensor that detects a differential pressure between the master-side gas circuit and the workpiece-side gas circuit; and
a processor configured to check whether the pressure difference detected by the differential pressure sensor is in a normal range while supplying gas with the equal pressure valve open, the exhaust valve open, and the constant flow rate control valve open.