CPC G01M 3/3263 (2013.01) [G01F 5/005 (2013.01)] | 18 Claims |
1. A gas leak sensing device comprising:
a constant flow rate control valve that controls the supply of gas of a constant flow rate;
a pressurization control valve that controls the supply of gas at a test pressure;
a supply-side gas circuit connected with the constant flow rate control valve and the pressurization control valve;
a master-side gas circuit to be connected with a master;
a workpiece-side gas circuit to be connected with a workpiece;
an equal pressure valve that performs opening and closing between the supply-side gas circuit and the master-side gas circuit and opening and closing between the supply-side gas circuit and the workpiece-side gas circuit;
an exhaust valve that performs only opening and closing between the workpiece-side gas circuit and outside;
a test pressure sensor that detects a pressure in the supply-side gas circuit;
a differential pressure sensor that detects a differential pressure between the master-side gas circuit and the workpiece-side gas circuit; and
a processor configured to check whether the pressure difference detected by the differential pressure sensor is in a normal range while supplying gas with the equal pressure valve open, the exhaust valve open, and the constant flow rate control valve open.
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