US 11,719,540 B2
MEMS gyroscope self-test using a technique for deflection of the sensing mobile mass
Yamu Hu, Allen, TX (US); Deyou Fang, Frisco, TX (US); David McClure, Carrollton, TX (US); Huantong Zhang, Coppell, TX (US); and Naren K. Sahoo, Frisco, TX (US)
Assigned to STMicroelectronics, Inc., Coppell, TX (US)
Filed by STMicroelectronics, Inc., Coppell, TX (US)
Filed on Jan. 10, 2022, as Appl. No. 17/571,973.
Application 17/571,973 is a continuation of application No. 16/452,967, filed on Jun. 26, 2019, granted, now 11,255,670.
Prior Publication US 2022/0128360 A1, Apr. 28, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01C 19/5719 (2012.01); H04L 27/38 (2006.01)
CPC G01C 19/5719 (2013.01) [H04L 27/3863 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A control circuit for a microelectromechanical system (MEMS) gyroscope sensor having a sensing mass, comprising:
a quadrature error compensation control loop for applying a cancelation force to the sensing mass to cancel quadrature error; and
a self-testing circuit comprising:
open loop circuitry configured to open the quadrature error compensation control loop and apply an additional force to produce a physical displacement of the sensing mass;
a sensing circuit configured to detect a quadrature error due to the physical displacement of the sensing mass in response to the applied additional force; and
a comparison circuit configured to compare the sensed quadrature error to an expected value corresponding to the applied additional force and generate a fault alert if the comparison is not satisfied.