US 11,719,534 B2
Computerized creation of measurement plans and plan-based control of measurement devices
Markus Ritter, Heidenheim (DE); Kilian Neumaier, Heidenheim (DE); and Steffen Hersacher, Westhausen (DE)
Assigned to Carl Zeiss Industrielle Messtechnik GmbH, Oberkochen (DE)
Filed by Carl Zeiss Industrielle Messtechnik GmbH, Oberkochen (DE)
Filed on Mar. 5, 2021, as Appl. No. 17/193,069.
Claims priority of application No. 20161279 (EP), filed on Mar. 5, 2020.
Prior Publication US 2021/0278206 A1, Sep. 9, 2021
Int. Cl. G01B 21/20 (2006.01); G01Q 30/04 (2010.01)
CPC G01B 21/20 (2013.01) [G01Q 30/04 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for creating a measurement plan of a dimensional measuring apparatus, the dimensional measuring apparatus having a measuring head configured to detect measurement points on a measurement element, the method comprising:
receiving a plurality of setting parameters defining a measurement or control command of a plurality of measurement or control commands of the dimensional measuring apparatus, wherein the plurality of setting parameters includes at least one of (i) a number of measurement points to be moved on to the measurement element, (ii) a measurement direction, (iii) a measurement speed, and (iv) edge finding parameters;
evaluating the plurality of setting parameters received based on at least one of a statistical evaluation and an evaluation using machine-assisted learning;
determining a presetting that assigns at least one setting parameter of the evaluated plurality of setting parameters to the measurement or control command;
outputting a setting parameter proposal to a user based on the determined presetting in response to receiving an input command from the user for selecting the measurement or control command;
creating the measurement plan in response to the user accepting or rejecting the setting parameter proposal; and
after creating the measurement plan, controlling the dimensional measuring apparatus using the measurement plan during a measurement operation.