CPC F04D 29/4286 (2013.01) [C23C 16/4412 (2013.01); F04D 29/62 (2013.01)] | 18 Claims |
1. A method of removing gases from a processing chamber, the method comprising:
aligning a first plurality of openings in a first ring-shaped body with a second plurality of openings in a second ring-shaped body to at least partially overlap the first plurality of openings with the second plurality of openings, the first ring-shaped body having an inner peripheral edge, an outer peripheral edge, a top surface and a bottom surface and the first plurality of openings extending through the first ring-shaped body from the top surface to the bottom surface, the first ring-shaped body having an annular groove in one of the top surface or bottom surface; and
applying reduced pressure to one side of the first ring-shaped body to draw gases through the at least partially overlapping first plurality of openings and second plurality of openings.
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