US 11,719,255 B2
Pumping liner for improved flow uniformity
Muhannad Mustafa, Milpitas, CA (US); Muhammad M. Rasheed, San Jose, CA (US); and Mario D. Sanchez, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 26, 2022, as Appl. No. 17/873,706.
Application 17/873,706 is a division of application No. 16/886,088, filed on May 28, 2020, granted, now 11,415,147.
Claims priority of provisional application 62/853,700, filed on May 28, 2019.
Prior Publication US 2022/0364575 A1, Nov. 17, 2022
Int. Cl. C23C 16/40 (2006.01); F04D 29/42 (2006.01); F04D 29/62 (2006.01); C23C 16/44 (2006.01)
CPC F04D 29/4286 (2013.01) [C23C 16/4412 (2013.01); F04D 29/62 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method of removing gases from a processing chamber, the method comprising:
aligning a first plurality of openings in a first ring-shaped body with a second plurality of openings in a second ring-shaped body to at least partially overlap the first plurality of openings with the second plurality of openings, the first ring-shaped body having an inner peripheral edge, an outer peripheral edge, a top surface and a bottom surface and the first plurality of openings extending through the first ring-shaped body from the top surface to the bottom surface, the first ring-shaped body having an annular groove in one of the top surface or bottom surface; and
applying reduced pressure to one side of the first ring-shaped body to draw gases through the at least partially overlapping first plurality of openings and second plurality of openings.