| CPC C23C 16/545 (2013.01) [B65H 20/00 (2013.01); B65H 20/10 (2013.01); C23C 16/45563 (2013.01)] | 4 Claims |
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1. A roll-to-roll deposition apparatus, comprising:
a preliminary chamber;
a process chamber separated from the preliminary chamber, the process chamber having a first end having a first height and a second end having a second height that is a same as the first height;
a slit disposed between the preliminary chamber and the process changer, the slit configured to be openable and closeable;
an extracting roller disposed in the preliminary chamber and configured to continuously supply a flexible substrate through the slit, the extracting roller being circular in a widthwise cross-section and having a shape in which each of a first longitudinal end portion and a second longitudinal end portion that is opposite the first longitudinal end portion has a width that is substantially the same as a width of a longitudinal central portion of the extracting roller, the longitudinal central portion of the extracting roller between the first longitudinal end portion of the extracting roller and the second longitudinal end portion of the extracting roller;
a drum that is entirely disposed in the process chamber such that the drum is closer to the second end of the process chamber than the first end of the process chamber, the drum configured to be in contact with a lower surface of the flexible substrate supplied from the extracting roller through the slit and the flexible substrate to be rotated about a longitudinal axis of the drum, the drum being circular in a widthwise cross-section and having a shape in which each of a first longitudinal end portion of the drum and a second longitudinal end portion of the drum that is opposite the first longitudinal end portion of the drum has a width that is smaller than a width of a longitudinal central portion of the drum, the longitudinal central portion of the drum between the first longitudinal end portion of the drum and the second longitudinal end portion of the drum;
a gas supply disposed at least partially within the process chamber at the second end of the process chamber, the gas supply having a surface that faces the drum such that the surface of the gas supply is closer to an upper surface of the flexible substrate than the lower surface of the flexible substrate in the process chamber, the gas supply to supply process gas to the upper surface of the flexible substrate in the process chamber; and
a winding roller disposed in the preliminary chamber, the winding roller configured to wind the flexible substrate transferred from the drum,
wherein each of the width of the first longitudinal end portion of the drum and the width of the second longitudinal end portion of the drum is at least 90% of the width of the longitudinal central portion of the drum, but less than the width of the longitudinal central portion of the drum,
wherein the surface of the gas supply that faces the substrate is concave along a length of the surface in a width direction of the drum and is concave along a length of the surface in a longitudinal direction of the drum such that a distance between the surface of the gas supply and the upper surface of the flexible substrate is substantially constant along a length of the upper surface of the flexible substrate in the width direction and along a length of the upper surface of the flexible substrate in the longitudinal direction,
wherein a heating element is disposed on a surface of or inside of the drum.
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