CPC C23C 16/52 (2013.01) [C23C 16/448 (2013.01); C23C 16/45544 (2013.01); C23C 16/45553 (2013.01); G01F 1/00 (2013.01); G05D 11/00 (2013.01); G05D 11/132 (2013.01); G05D 16/00 (2013.01); G05D 16/04 (2013.01); G05D 16/0402 (2019.01); H01L 21/00 (2013.01); H01L 21/67253 (2013.01); H01L 22/00 (2013.01)] | 11 Claims |
1. A method of controlling precursor flow, comprising:
measuring a change in detected signal intensity in a cell of the gas delivery system, caused by the flow of a precursor;
determining a precursor flux value based upon the change in the detected signal intensity;
determining a flux error value based upon the precursor flux value;
calculating a new set of temperature setpoints to be applied to an ampoule that contains the precursor; and
checking for an end-of ampoule-life condition when the new set of temperature setpoints is not within a set of current temperature limits of the ampoule.
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