US 11,718,913 B2
Gas distribution system and reactor system including same
Sonti Sreeram, Gilbert, AZ (US); Junwei Su, Tempe, AZ (US); and Loc Vinh Tran, Gilbert, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Jun. 4, 2018, as Appl. No. 15/997,445.
Prior Publication US 2019/0368041 A1, Dec. 5, 2019
Int. Cl. C23C 16/455 (2006.01); H01J 37/32 (2006.01)
CPC C23C 16/45587 (2013.01) [C23C 16/45557 (2013.01); C23C 16/45561 (2013.01); C23C 16/45563 (2013.01); H01J 37/32449 (2013.01); H01J 37/32458 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A gas distribution system comprising:
a first gas supply line;
a first gas manifold coupled to the first gas supply line, wherein the first gas manifold comprises a plurality of first gas outlets;
a plurality of first gas flow sensors, wherein at least one of the plurality of first gas flow sensors is coupled to each of the plurality of first gas outlets;
a plurality of first gas valves, wherein at least one of the plurality of first gas valves is coupled to an outlet of each of the plurality of first gas flow sensors;
a first gas pressure-controlled vent line selectively fluidly coupled to an outlet of each of the plurality of first gas valves;
a second gas supply line;
a second gas manifold coupled to the second gas supply line, wherein the second gas manifold comprises a plurality of second gas outlets;
a plurality of second gas flow sensors, wherein at least one of the plurality of second gas flow sensors is coupled to each of the plurality of second gas outlets;
a plurality of second gas valves, wherein at least one of the plurality of second gas valves is coupled to an outlet of each of the plurality of second gas flow sensors;
a second gas pressure-controlled vent line selectively fluidly coupled to an outlet of each of the plurality of second gas valves;
a first pressure transducer configured to measure the pressure within the first gas pressure-controlled vent line;
a second pressure transducer configured to measure the pressure within the second gas pressure-controlled vent line;
a third pressure transducer configured to measure a reaction chamber pressure within the reaction chamber;
a vacuum source coupled to the first gas pressure-controlled vent line; and
a controller programmed to operate the vacuum source, during operations of the gas distribution system to provide a first gas via the first gas supply line to the first gas manifold or to provide a second gas via the second gas supply line to the second gas manifold, to maintain a pressure measured by the first and second pressure transducers in the first and second gas pressure-controlled vent lines within plus or minus ten percent of the reaction chamber pressure within the reaction chamber,
wherein the first gas pressure-controlled vent line is between the plurality of first gas valves and the reaction chamber,
wherein the second gas pressure-controlled vent line is between the plurality of second gas valves and the reaction chamber,
wherein the plurality of first gas valves is between the plurality of first gas flow sensors and the first gas pressure-controlled vent line.