CPC C01B 32/182 (2017.08) | 20 Claims |
1. A system for forming graphene, said system comprising:
a substrate holder designed to hold a substrate sheet;
one or more tunnels disposed adjacent to said substrate holder;
multiple processing sub-enclosures disposed laterally adjacent to one or more said tunnels such that said substrate holder continuously laterally extends from inside one or more said tunnels into said multiple processing sub-enclosures;
multiple scavenging gas outlets disposed inside one or more said tunnels, wherein at least some of said scavenging gas outlets are oriented at an angle with respect to an axis that is perpendicular to said substrate holder and designed to provide an angular stream of a substrate gas scavenging composition to contact and scavenge substrate gas in and around said substrate sheet;
multiple gas distribution subsystems communicatively coupled, at one end, to one or more reservoirs having stored therein same type of component gases that form an annealing gas composition and communicatively coupled, at another end, to at least one said processing sub-enclosure and designed to dispense therein said annealing gas composition, and wherein multiple said gas distribution subsystems designed to dispense said annealing gas composition inside at least one said processing sub-enclosure;
one or more heat sources disposed laterally adjacent to at least one said processing sub-enclosure and designed to provide heat therein; and
wherein, in absence of an effective gas or a mechanical barrier within and between one or more said tunnels and at least one said processing sub-enclosure, said system for forming graphene is designed to allow heat and said annealing gas composition present inside at least one said processing sub-enclosure to flow into and facilitate scavenging inside one or more said tunnels.
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