US 11,718,518 B1
MEMS with small-molecule barricade
Charles I. Grosjean, Los Gatos, CA (US); Paul M. Hagelin, Saratoga, CA (US); Michael Julian Daneman, Campbell, CA (US); Ginel C. Hill, Sunnyvale, CA (US); and Aaron Partridge, Cupertino, CA (US)
Assigned to SiTime Corporation, Sunnyvale, CA (US)
Filed by SiTime Corporation, Santa Clara, CA (US)
Filed on Sep. 9, 2020, as Appl. No. 17/16,099.
Application 17/016,099 is a division of application No. 15/887,145, filed on Feb. 2, 2018, granted, now 10,800,650.
Claims priority of provisional application 62/453,993, filed on Feb. 2, 2017.
Int. Cl. B81B 7/00 (2006.01); B81C 1/00 (2006.01)
CPC B81B 7/0038 (2013.01) [B81C 1/00285 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An integrated circuit comprising:
a silicon substrate;
a lid;
a microelectromechanical system (MEMS) structure having a movable body within a cavity, the cavity being defined at least in part by release of oxide from at least one oxide layer through at least one vent in the lid, and at least one electrode;
one or more electrical contacts on an exterior surface of the integrated circuit;
at least one conductive via that electrically couples the one or more electrical contacts with the at least one electrode;
one or more barrier layers to inhibit diffusion of hydrogen and helium through an oxide present in the lid;
one or more barrier materials encircling the at least one oxide layer;
wherein the one or more barrier layers, the one or more barrier materials, the at least one via, the lid and the silicon substrate encapsulate the cavity relative to an atmosphere outside said integrated circuit, so as to inhibit the passage of hydrogen from the atmosphere into said cavity.