CPC B29C 59/02 (2013.01) [B29C 59/002 (2013.01); G03F 7/0002 (2013.01); B29C 59/16 (2013.01)] | 7 Claims |
1. An imprint apparatus that forms a curable composition on a substrate using a mold, the imprint apparatus comprising:
a first measurement unit including holding mechanism of a probe, configured to measure a first height distribution of the substrate at a contact position where the mold and the curable composition are in contact with each other,
a substrate height sensor configured to measure a second height distribution of the substrate at a non-contact position different from the contact position,
a control device configured to control the first measurement unit and the substrate height sensor,
wherein the first measurement unit measures a height of the substrate by bringing the probe into contact with a surface of the substrate, the probe having a contact surface area smaller than a contact surface area of the mold, and
the control device is configured to correct a tilt of the substrate at the contact position based on the first height distribution and the second height distribution.
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