US 11,717,931 B2
Apparatus and method for double-side polishing work
Mami Kubota, Tokyo (JP); and Keiichi Takanashi, Tokyo (JP)
Assigned to SUMCO CORPORATION, Tokyo (JP)
Appl. No. 16/958,279
Filed by SUMCO CORPORATION, Tokyo (JP)
PCT Filed Oct. 22, 2018, PCT No. PCT/JP2018/039167
§ 371(c)(1), (2) Date Jun. 26, 2020,
PCT Pub. No. WO2019/130757, PCT Pub. Date Jul. 4, 2019.
Claims priority of application No. 2017-253906 (JP), filed on Dec. 28, 2017.
Prior Publication US 2020/0346319 A1, Nov. 5, 2020
Int. Cl. B24B 37/08 (2012.01); B24B 37/04 (2012.01)
CPC B24B 37/08 (2013.01) [B24B 37/042 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A double-side polishing apparatus for a work, including rotating plates having an upper plate and a lower plate, a sun gear provided at a center portion of the rotating plates, an internal gear provided at a peripheral portion of the rotating plates, and a carrier plate, which is provided between the upper plate and the lower plate provided with one or more openings for holding the work,
wherein one of the upper plate and the lower plate has one or more holes penetrating from a top surface to a bottom surface of the one of the upper plate and the lower plate,
the double-side polishing apparatus for the work comprises one or more work thickness measuring devices which can measure a thickness of each work through the one or more holes in real time during double-side polishing of the work, and
the double-side polishing apparatus comprises a computer for determining, during the double-side polishing of the work, timing of termination of the double-side polishing of the work, wherein the computer is configured to:
group data of thicknesses of the works, measured using the work thickness measuring devices on a work basis;
extract shape components of each work from the thickness data of the work;
identify a position of each of the shape components on the work having been subjected to measurement in a work radial direction;
compute a shape distribution of the work from the identified position on the work in the work radial direction and the shape components of the work;
obtain a shape index of the work from the computed shape distribution of the work; and
determine timing of termination of the double-side polishing of the work based on the obtained shape index of the work,
wherein the double-side polishing apparatus is configured to terminate the double-side polishing with the determined timing of termination of the double-side polishing of the work.