CPC B23K 20/005 (2013.01) [B23K 20/10 (2013.01); B23K 20/26 (2013.01); H01L 24/78 (2013.01); B23K 2101/40 (2018.08); B23K 2101/42 (2018.08); H01L 2224/789 (2013.01); H01L 2224/78301 (2013.01); H01L 2224/78349 (2013.01)] | 5 Claims |
1. A capillary guide device, adapted to guide a capillary into a holding hole of a bonding tool, comprising:
a guide body portion, capable of being in contact with the capillary held in the holding hole; and
a drive portion, arranging the guide body portion at a position capable of being in contact with the capillary by moving the guide body portion along a second direction, wherein the second direction is a direction intersecting a first direction along a central axis of the holding hole, wherein
the drive portion comprises:
a moving body, connected to the guide body portion;
a drive shaft, extending in the second direction and exerting a frictional resistance force with the moving body; and
an ultrasonic wave generation body, fixed to an end of the drive shaft and supplying an ultrasonic wave to the drive shaft.
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