CPC B08B 9/08 (2013.01) [B08B 3/08 (2013.01); B08B 5/00 (2013.01); C23C 16/4405 (2013.01); B08B 2209/08 (2013.01)] | 8 Claims |
1. A method of cleaning tin oxide from interior portions of a plasma-based processing chamber, the method comprising:
introducing methane into the processing chamber;
maintaining a temperature of greater than about 135° C. within the processing chamber to maintain a concentration level of the methane; and
avoiding introducing chlorine into the processing chamber.
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