US 11,717,796 B2
Paddle, plating apparatus equipped with the paddle, and plating method
Yasuyuki Masuda, Tokyo (JP); Masashi Shimoyama, Tokyo (JP); Jumpei Fujikata, Tokyo (JP); Yohei Wakuda, Tokyo (JP); and Shao Hua Chang, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by EBARA CORPORATION, Tokyo (JP)
Filed on Feb. 5, 2021, as Appl. No. 17/169,130.
Application 17/169,130 is a continuation of application No. 15/887,430, filed on Feb. 2, 2018, granted, now 10,946,351.
Claims priority of application No. 2017-019507 (JP), filed on Feb. 6, 2017.
Prior Publication US 2021/0154629 A1, May 27, 2021
Int. Cl. B01F 31/00 (2022.01); B01F 31/441 (2022.01); C25D 17/00 (2006.01); C25D 21/10 (2006.01); C25D 17/06 (2006.01); C25D 17/02 (2006.01); C25D 21/18 (2006.01); C25D 21/12 (2006.01); B01F 101/58 (2022.01)
CPC B01F 31/441 (2022.01) [B01F 31/70 (2022.01); C25D 17/001 (2013.01); C25D 17/02 (2013.01); C25D 17/06 (2013.01); C25D 21/10 (2013.01); C25D 21/18 (2013.01); B01F 2101/58 (2022.01); C25D 21/12 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A paddle for agitating a plating solution by reciprocating parallel to a surface of a substrate, comprising:
a plurality of agitation rods being parallel to the surface of the substrate,
wherein each of the agitation rods includes:
a planar portion perpendicular to a reciprocating direction of the paddle, the planar portion forming a swirling flow of the plating solution that pulls the plating solution that has come into contact with the substrate back toward the paddle;
two slope surfaces extending from side ends of the planar portion in directions closer to each other, the two slope surfaces being symmetric with respect to a center line of the agitation rod, the center line being perpendicular to the planar portion, the two slope surfaces forming a flow that pushes the plating solution toward the surface of the substrate; and
a tip portion connected with the two slope surfaces, the tip portion facing in the reciprocating direction of the paddle,
wherein the agitation rods comprise first agitation rods facing in the same one direction and second agitation rods facing in the opposite direction, and
wherein the first agitation rods and the second agitation rods are arranged alternately.