CPC H01L 23/15 (2013.01) [B32B 1/00 (2013.01); B32B 9/005 (2013.01); B32B 17/06 (2013.01); C03C 3/085 (2013.01); C03C 3/087 (2013.01); C03C 3/091 (2013.01); C03C 3/093 (2013.01); C03C 17/22 (2013.01); C03C 27/04 (2013.01); H01L 23/13 (2013.01); B32B 2307/30 (2013.01); B32B 2457/14 (2013.01)] | 17 Claims |
1. A glass substrate, comprising a glass having a density of from 2.40 g/cm3 to 2.60 g/cm3; wherein
when a sag amount of the glass substrate is defined as S (unit: mm) and a thickness of the glass substrate is defined as T (unit: mm), S×T3 is 0.0001 to 6,
the glass substrate has a warpage of 2 μm to 300 μm, and
a maximum local inclination angle due to the warpage of the glass substrate is from 0.0004° to 0.12°.
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